Passive Capillary Flow of Dyed Water in SU-8 based Glass Microfluidic Devices integrated with Polyimide Layer on the Bottom Wall

Abstract

In this work, total 4 individual SU-8 based glass microfluidic devices are fabricated by the maskless lithography and indirect bonding technique. The polyimide layer is integrated on the selected portion of glass bottom wall of each device. Each passive capillary flow of dyed water is recorded by a CMOS camera catching 25 frames per second. This work will be useful to fabricate the SU-8 based laboratory-on-a-chip systems for microfluidic applications.

Keywords: Passive capillary flow, SU-8, Polyimide, Microfluidic device